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Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics

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cris.sourceIdoai:irek.ase.md:1234567890/404
dc.creatorPrisacaru, Andrian
dc.date2020-08-25T10:53:25Z
dc.date2020-08-25T10:53:25Z
dc.date2017-09
dc.date.accessioned2023-11-13T10:00:40Z
dc.date.available2023-11-13T10:00:40Z
dc.descriptionPRISACARU, Andrian. Implementation of modern research techniques of mechanical properties of silicon and its results application in electronics. In: Competitivitatea şi inovarea în economia cunoaşterii [online]: conf. şt. intern., 22-23 sept., 2017: Culegere de articole. Chişinău: ASEM, 2018, vol. 5, pp. 77-80. E-ISBN 978-9975-75-901-4.
dc.descriptionAlthough a lot of new materials for micro- and optoelectronics have been elaborated within the last years, silicon remains the principal component of most semiconductor devices and has many industrial uses. Along with electrical and optical properties, mechanical behavior of Si, especially under local loading, obtained a special interest due to its peculiarity for structural phase transformation in nano- or micro-volumes of deformed material. Implementation of modern research techniques of mechanical properties of silicon was investigated in this work. JEL CLASSIFICATION: L63, L94
dc.formatapplication/pdf
dc.identifier978-9975-75-901-4
dc.identifier${dspace.ui.url}/handle/1234567890/404
dc.identifierhttp://irek.ase.md:80/xmlui/handle/1234567890/404
dc.identifier.urihttps://cris.ase.md/handle/123456789/871
dc.languageen
dc.publisherASEM
dc.subjectnanoindentation
dc.subjectmechanical properties
dc.subjectSilicon
dc.subjecthardness
dc.titleImplementation of modern research techniques of mechanical properties of silicon and its results application in electronics
dc.typeArticle
dspace.entity.typePublication
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